100 µm stroke, 0.4 nm resolution, compatible with high-load objective lenses, high-speed and high-precision PIFOC focus scanner.
In the focus control of objective lenses in optical instruments and measurement devices, high-precision Z positioning and fast response are required. Particularly when the objective lens is large and has a high numerical aperture (NA), conventional mechanisms face challenges in operational response and stability, which can affect measurement accuracy and observation quality.
The P-726 PIFOC high-load objective lens focus scanner achieves high-precision focus control with sub-nanometer resolution obtained through direct measurement using capacitive sensors, with a maximum stroke of 100 µm. Additionally, the flexure guide structure eliminates friction and backlash, maintaining high rigidity and stability even under high-load conditions. This enhances the accuracy and throughput of optical measurement devices, increasing the reliability of measurements and observations.
[Application Scenarios]
- Precision focus control of objective lenses
- Z-scanning for confocal microscopes and super-resolution microscopes
- 3D optical imaging devices
- High-precision optical measurement devices (interferometers, autofocus systems)
[Benefits of Implementation]
- Improved optical measurement accuracy through high-precision Z position control
- Reduced inspection and observation time due to fast operational response
- High-load performance compatible with heavy lenses
- Long-term stability and low maintenance requirements
